Specialty IC

Bridging the digital and physical worlds, Specialty IC’s supplement Logic technology, creating a new wave of technological innovation.  Our products will help enable you to move in parallel with this new wave of technology.

Key Applications

  • Angstrom-resolution Thin Film control for FEOL modules: Deposition, Diffusion, Lithography
  • Patterning, Etch and CMP control
  • Trench/OCD Critical Etch Profiles for current and next generation technology nodes and Various Etch Processes such as STI, DTI, Deep Etch
  • High Aspect Ratio Trench Structures (i.e. 20:1)
  • Sidewall Angle and Trench Profile control for Motion Sensor, Touch Sensor, Pressure Sensor, Gyroscope, Accelerometer applications

Products For Use in The Specialty IC Market

Olympian Series

The n&k Olympian Series is our flagship high-throughput DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering Reflectance measurements in the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s OptiPrime (DUV-Vis-NIR) series, making the Olympian the most versatile optical metrology tool in the industry for monitoring Thin Film and Trench/OCD applications.

Product Details →

OptiPrime-X Series

The n&k OptiPrime-X series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology and a single wavelength ellipsometer at 633nm for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime-X series are field proven to meet your high-volume production needs.

Product Details →

OptiPrime Series

The n&k OptiPrime series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime series are field proven to meet your high-volume production needs.

Product Details →

Benchtop Systems

The n&k OptiPrime M Benchtop Metrology System for your Thin Film or Trench/OCD applications Incorporates Reflectance-only or Reflectance and Transmittance

Product Details →

Gemini Series

The n&k Gemini series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes. Capable of simultaneous Reflectance and Transmittance measurements the Gemini series is ideal for applications with transparent substrates (i.e., Photomasks, SiC Wafers, Quartz Wafers, Flat Panels, etc.)

Product Details →
Malcare WordPress Security