Automotive

Internal Combustion Engine (ICE) and Electric Vehicle (EV) automotive platforms both require the most reliable and cost-effective semiconductor solutions. Today’s vehicles use Silicon (Si) MEMS sensors and actuators, integrated circuits (IC) for motor control and for sensor-fusion toward autonomous driving, as well as silicon carbide (SiC) and gallium-nitride (GaN) power chips.

To meet international standards, fabrication processes must be monitored to ensure meeting the highest quality and reliability. In-line process control using non-contact optical metrology ensures yield today and performance tomorrow.

The n&k Technology advantage of hardware, software, and applications expertise results in unparalleled cost-effective metrology for High Volume Manufacturing (HVM) fabs worldwide.

Metrology for Essential Process Steps

  • Angstrom-resolution control for Deposition, Diffusion, Epitaxy, & Lithography
  • Etched Poly & Oxide Recesses, Contacts, Trench Isolation (STI & DTI)
  • High Aspect-Ratio (>20:1) trenches and vias, along with sidewall angle
  • BPSG boron and phosphorous concentrations
  • Engineered substrate layers of SOI and GaN-On-Silicon (GOS) for wafers
Car/Automotive Tech

Products For Use in The Automotive Market

Olympian Series

The n&k Olympian Series is our flagship high-throughput DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering Reflectance measurements in the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s OptiPrime (DUV-Vis-NIR) series, making the Olympian the most versatile optical metrology tool in the industry for monitoring Thin Film and Trench/OCD applications.

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OptiPrime-X Series

The n&k OptiPrime-X series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology and a single wavelength ellipsometer at 633nm for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime-X series are field proven to meet your high-volume production needs.

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OptiPrime Series

The n&k OptiPrime series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime series are field proven to meet your high-volume production needs.

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Benchtop Systems

The n&k OptiPrime M Benchtop Metrology System for your Thin Film or Trench/OCD applications Incorporates Reflectance-only or Reflectance and Transmittance

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