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Internal Combustion Engine (ICE) and Electric Vehicle (EV) automotive platforms both require the most reliable and cost-effective semiconductor solutions. Today’s vehicles use Silicon (Si) MEMS sensors and actuators, integrated circuits (IC) for motor control and for sensor-fusion toward autonomous driving, as well as silicon carbide (SiC) and gallium-nitride (GaN) power chips.
To meet international standards, fabrication processes must be monitored to ensure meeting the highest quality and reliability. In-line process control using non-contact optical metrology ensures yield today and performance tomorrow.
The n&k Technology advantage of hardware, software, and applications expertise results in unparalleled cost-effective metrology for High Volume Manufacturing (HVM) fabs worldwide.
Metrology for Essential Process Steps
The n&k Olympian Series is our flagship high-throughput DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering Reflectance measurements in the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s OptiPrime (DUV-Vis-NIR) series, making the Olympian the most versatile optical metrology tool in the industry for monitoring Thin Film and Trench/OCD applications.
The n&k OptiPrime-X series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology and a single wavelength ellipsometer at 633nm for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime-X series are field proven to meet your high-volume production needs.
The n&k OptiPrime series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime series are field proven to meet your high-volume production needs.
The n&k LittleFoot series are smallest-in-class footprint DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. Save valuable fab space with the LittleFoot series which is about 40% smaller than competing metrology tools.
1-408-513-3800
1-866-873-6241 (Toll Free)
1-408-513-3850 (Fax)
Inquiries: inforequest@nandk.com
Sales: sales@nandk.com
Customer Support: service@nandk.com
n&k Technology Inc.
80 Las Colinas Lane
San Jose, CA 95119
