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CMOS Image Sensor (CIS) technology is the world-standard for visible-light digital cameras used in automotive, consumer, and medical markets. CIS chips are made using both Complementary Metal-Oxide Semiconductor (CMOS) fabrication processes for logic ICs and specialty process modules derived from MEMS fabrication.
While the CMOS process steps used in CIS production are generally standard, the Image Sensor process modules use unique flows and thus require unique metrology to control yield. Non-contact optical metrology proven in MEMS manufacturing has been tuned to allow for control of Image Sensor formation.
The n&k Technology advantage of hardware, software, and applications expertise results in unparalleled cost-effective metrology for High Volume Manufacturing (HVM) fabs worldwide.
Metrology for Essential Process Steps
The n&k Olympian Series is our flagship high-throughput DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering Reflectance measurements in the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s OptiPrime (DUV-Vis-NIR) series, making the Olympian the most versatile optical metrology tool in the industry for monitoring Thin Film and Trench/OCD applications.
The n&k OptiPrime-X series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology and a single wavelength ellipsometer at 633nm for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime-X series are field proven to meet your high-volume production needs.
The n&k OptiPrime series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime series are field proven to meet your high-volume production needs.
The n&k LittleFoot series are smallest-in-class footprint DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. Save valuable fab space with the LittleFoot series which is about 40% smaller than competing metrology tools.
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Customer Support: service@nandk.com
n&k Technology Inc.
80 Las Colinas Lane
San Jose, CA 95119
