Power Device

Foundational in our technological eco-system in respect to electrical voltage and current flow, these devices are everywhere from the smallest consumer goods to the largest aircraft. Our products ensure Power Devices manufacturing meets the highest quality standards and specifications.

Key Applications

  • Silicon based processes or Next Generation substrates such as SiC and GaN
  • Angstrom-resolution Thin Film control for FEOL modules: Deposition, Diffusion, Lithography
  • Trench/OCD Critical Processes such as Poly Recess, Oxide Recess, Contact for current and next generation technology nodes
  • Various Etch Processes such as STI, DTI, Deep Etch
  • Sidewall Angle monitoring
  • BCD (BIPOLAR-CMOS-DMOS) Processes
  • High Aspect Ratio Trench Structures (i.e. 20:1)
  • Epi thickness, BPSG concertation, thick SOI monitoring
  • Process monitoring for products including MOSFET, Power MOS, IGBT, Discretes, Super Junctions, Diodes and Rectifiers

Products For Use in The Power Device Market

Olympian Series

The n&k Olympian Series is our flagship high-throughput DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering Reflectance measurements in the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s OptiPrime (DUV-Vis-NIR) series, making the Olympian the most versatile optical metrology tool in the industry for monitoring Thin Film and Trench/OCD applications.

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OptiPrime-X Series

The n&k OptiPrime-X series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology and a single wavelength ellipsometer at 633nm for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime-X series are field proven to meet your high-volume production needs.

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OptiPrime Series

The n&k OptiPrime series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime series are field proven to meet your high-volume production needs.

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LittleFoot Series

The n&k LittleFoot series are smallest-in-class footprint DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. Save valuable fab space with the LittleFoot series which is about 40% smaller than competing metrology tools.

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Gemini Series

The n&k Gemini series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes. Capable of simultaneous Reflectance and Transmittance measurements the Gemini series is ideal for applications with transparent substrates (i.e., Photomasks, SiC Wafers, Quartz Wafers, Flat Panels, etc.)

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