Menu
Silicon (Si), silicon carbide (SiC), and gallium-nitride (GaN) power chips regulate electrical voltages and current flows in diverse consumer products, industrial equipment, and the latest Electric Vehicles (EV).
Fabrication processes must be monitored to ensure meeting the highest quality and reliability standards for Power Device types including MOSFET, Power MOS, IGBT, BIPOLAR-CMOS-DMOS (BCD), Super Junctions, Diodes, and Rectifiers.
The n&k Technology advantage of hardware, software, and applications expertise results in unparalleled cost-effective metrology for High Volume Manufacturing (HVM) fabs worldwide.
Metrology for Essential Process Steps
The n&k Olympian Series is our flagship high-throughput DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering Reflectance measurements in the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s OptiPrime (DUV-Vis-NIR) series, making the Olympian the most versatile optical metrology tool in the industry for monitoring Thin Film and Trench/OCD applications.
The n&k OptiPrime-X series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology and a single wavelength ellipsometer at 633nm for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime-X series are field proven to meet your high-volume production needs.
The n&k OptiPrime series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime series are field proven to meet your high-volume production needs.
The n&k LittleFoot series are smallest-in-class footprint DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. Save valuable fab space with the LittleFoot series which is about 40% smaller than competing metrology tools.
The n&k Gemini series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes. Capable of simultaneous Reflectance and Transmittance measurements the Gemini series is ideal for applications with transparent substrates (i.e., Photomasks, SiC Wafers, Quartz Wafers, Flat Panels, etc.)
1-408-513-3800
1-866-873-6241 (Toll Free)
1-408-513-3850 (Fax)
Inquiries: inforequest@nandk.com
Sales: sales@nandk.com
Customer Support: service@nandk.com
n&k Technology Inc.
80 Las Colinas Lane
San Jose, CA 95119
