MEMS

The world of MEMS manufacturing continues to grow as sensors, actuators, microvalves, and micropumps are rapidly produced due to their stellar device performance and low-cost levels. Our products are well established in the MEMS production line for ensuring high yield.

Key Applications

  • Silicon based processes or Next Generation substrates such as SiC and GaN
  • Angstrom-resolution Thin Film control for FEOL modules: Deposition, Diffusion, Lithography
  • Trench/OCD Critical Processes such as Poly Recess, Oxide Recess, Contact for current and next generation technology nodes
  • Various Etch Processes such as STI, DTI, Deep Etch
  • Sidewall Angle and Trench Profile control for Motion Sensor, Touch Sensor, Pressure Sensor, Gyroscope, Accelerometer applications
MEMS

Products For Use in The MEMS Market

Olympian Series

The n&k Olympian Series is our flagship high-throughput DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering Reflectance measurements in the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s OptiPrime (DUV-Vis-NIR) series, making the Olympian the most versatile optical metrology tool in the industry for monitoring Thin Film and Trench/OCD applications.

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OptiPrime-X Series

The n&k OptiPrime-X series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology and a single wavelength ellipsometer at 633nm for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime-X series are field proven to meet your high-volume production needs.

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OptiPrime Series

The n&k OptiPrime series are high-throughput DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. The n&k OptiPrime series are field proven to meet your high-volume production needs.

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LittleFoot Series

The n&k LittleFoot series are smallest-in-class footprint DUV-Vis-NIR scatterometers/thin film metrology systems, covering Reflectance measurements in the wavelength range from 190nm – 1000nm with micro-spot technology for monitoring Thin Film and Trench/OCD applications. Save valuable fab space with the LittleFoot series which is about 40% smaller than competing metrology tools.

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