MEMS

The world of MEMS manufacturing continues to grow as sensors, actuators, microvalves, and micropumps are rapidly produced due to their stellar device performance and low-cost levels. Our products are well established in the MEMS production line for ensuring high yield.

Key Applications

• Silicon based processes or Next Generation substrates such as SiC and GaN
• Angstrom-resolution Thin Film control for FEOL modules: Deposition, Diffusion, Lithography
• Trench/OCD Critical Processes such as Poly Recess, Oxide Recess, Contact for current and next generation technology nodes
• Various Etch Processes such as STI, DTI, Deep Etch
• Sidewall Angle and Trench Profile control for Motion Sensor, Touch Sensor, Pressure Sensor, Gyroscope, Accelerometer applications