CMOS Image Sensor (CIS) technology is the world-standard for visible-light digital cameras used in automotive, consumer, and medical markets. CIS chips are made using both Complementary Metal-Oxide Semiconductor (CMOS) fabrication processes for logic ICs and specialty process modules derived from MEMS fabrication.
While the CMOS process steps used in CIS production are generally standard, the Image Sensor process modules use unique flows and thus require unique metrology to control yield. Non-contact optical metrology proven in MEMS manufacturing has been tuned to allow for control of Image Sensor formation.
The n&k Technology advantage of hardware, software, and applications expertise results in unparalleled cost-effective metrology for High Volume Manufacturing (HVM) fabs worldwide.
Metrology for Essential Process Steps
