Latest Generation Metrology for Combined Thin Films and OCD Measurements: The n&k EclipSE is our latest generation metrology system that combines spectroscopic reflectometry with single-wavelength ellipsometry. The EclipSE is a fully automated high-throughput system for applications involving ultra-thin films less than a few nm, as well as multi-layer film stacks and very thick films. The EclipSE also provides OCD measurements of complex trench and hole structures, with the accuracy, repeatability, and reproducibility that meets the Ultra-tight specs of advanced FABs.

Optiprime scatterometer ships to a leading power device manufacturer in Germany. The n&k OptiPrime is one of n&k’s bestselling tools for power devices, offering the capability to measure complex film stacks, 2D (trenches) and 3D (contact holes)." class="tb-button tb-button-small default read-more" target="_self">View Post

Effects of Measured Spectral Range on Accuracy and Repeatability of OCD Analysis, published in Solid State Technology, co-authored by Infineon and n&k.

Posted on July 1, 2013 by Thomas Luong in News No Comments

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Gemini passes intense acceptance testing by a major US semiconductor manufacturer for measurements of EUV photomasks. The n&k Gemini is an ultra-high resolution scatterometer specifically designed for accurate and repeatable OCD measurements of depths, CDs and profiles of complex 2-D and 3-D structures, as well as thicknesses, and n and k spectra of multi-layer films pertaining to photomasks.">The n&k Gemini passes intense acceptance testing by a major US semiconductor manufacturer for measurements of EUV photomasks. The n&k Gemini is an ultra-high resolution scatterometer specifically designed for accurate and repeatable OCD measurements of depths, CDs and profiles of complex 2-D and 3-D structures, as well as thicknesses, and n and k spectra of multi-layer films pertaining to photomasks.

Posted on April 1, 2013 by Thomas Luong in News No Comments

Gemini passes intense acceptance testing by a major US semiconductor manufacturer for measurements of EUV photomasks. The n&k Gemini is an ultra-high resolution scatterometer specifically designed for accurate and repeatable OCD measurements of depths, CDs and profiles of complex 2-D and 3-D structures, as well as thicknesses, and n and k spectra of multi-layer films pertaining to photomasks." class="tb-button tb-button-small default read-more" target="_self">View Post

LittleFoot scatterometers ship to leading power device manufacturers in Japan. The cost effective, fully automated LittleFoot , with a footprint less than 40% (approximately) of conventional scatterometers, has all the capabilities of the n&k OptiPrime, providing measurements of complex film stacks, 2D (trenches) and 3D (contact holes).">Two n&k LittleFoot scatterometers ship to leading power device manufacturers in Japan. The cost effective, fully automated LittleFoot , with a footprint less than 40% (approximately) of conventional scatterometers, has all the capabilities of the n&k OptiPrime, providing measurements of complex film stacks, 2D (trenches) and 3D (contact holes).

Posted on February 1, 2013 by Thomas Luong in News No Comments

LittleFoot scatterometers ship to leading power device manufacturers in Japan. The cost effective, fully automated LittleFoot , with a footprint less than 40% (approximately) of conventional scatterometers, has all the capabilities of the n&k OptiPrime, providing measurements of complex film stacks, 2D (trenches) and 3D (contact holes)." class="tb-button tb-button-small default read-more" target="_self">View Post