TF Series:OptiPrime-TF, OptiPrime-TF-M,
LittleFoot-TF
DUV-Vis-NIR (Wavelength Range: 190nm – 1000nm) Thin Film Metrology Systems for Patterned and Unpatterned Wafers:
The n&k OptiPrime-TF, OptiPrime-TF-M and n&k LittleFoot-TF are DUV-Vis-NIR thin film only metrology systems, based on unpolarized Reflectance (R) measurements from 190nm to 1000nm with microspot technology. These tools measure thickness and n and k spectra from 190nm – 1000nm of thin films on patterned and unpatterned wafers.
Analogous to their scatterometer counterparts, the OptiPrime-TF, OptiPrime-TF-M and LittleFoot-TF are our “next-generation” DUV-Vis-NIR thin film series, launched in 2012, superseding the previous generation, 7000, 3000, and 1700 Series, respectively. Advancements in the optical design of the OptiPrime-TF Series provide a smaller micro spot over the previous generation.
The n&k LittleFoot-TF is a fully automated system, with approximately 40% reduction in footprint, resulting in a significant savings in the utilization of fab space. This reduction in footprint is achieved through an innovative and patented wafer handling mechanism. The n&k Little-Foot-TF is as reliable and fast as any robot-based handing system, but at a much reduced cost.
Below are examples of measurements achieved by the OptiPrime-TF Series and Littlefoot-TF for both patterned and blanket films:
- Standard films such as SiOx, SiNx, Poly-Si, a-Si:H, SiCx,
SiGex, a-C:H, TiNx, AlOx - Polyresists, polymers, polyimides
- Thin metal films (less than ~ 800Å in general)
- – Al
- – CrSi
- – Ta
- – Ti
- – W
- – Cu
- – Fe
- – Au
- – Ag
- High-k films
- Low-k films
- Chalcogenide films
- SOI
- Graphene
- Inhomogeneous films
- A variety of complex film stacks, including
- – Multi-Layer Film Stacks with Inhomogeneous Under-Layer
- – Multi-Layer Film Stacks with Unknown Under-Layer
- – Ultra-Thin Films (down to a few Å), e.g., a Monolayer of Graphene
- Ultra-Thin Residual Layers
- Films Deposited on Rough Surfaces
- Films on Substrates Besides Silicon:
- – For example: GaAs, SiC, AlTiC
- Films on rough surfaces
- Surface and interface roughness of thin films
- Energy Band Gap
- Compositon (e.g., %Ge in SiGex; %N, %H, %O in SiOxNx:H,
%N in TiNx, etc.) - Crystallinity (e.g., degree of crystallinity of Poly-Si or GST)
The TF Series includes a variety of tools, both manual and automatic, for a variety of wafer sizes. The table below presents the differences between the tools:
Model | Wafer Size | Wafer Handling |
OptiPrime-TF | 300mm, 200mm, 150mm | Fully Automated |
OptiPrime-TF- M | 300mm, 200mm, 150mm | Manual Load with Automated X- Y Stage |
LittleFoot-TF | 200mm, 150mm | Fully Automated with unique wafer handling mechanism that reduces the footprint |