Olympian Series: Olympian
General Overview DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) The n&k Olympian Series is a DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series. The systems in the Olympian-Series are capable of determining thickness, n and k spectra from 190nm – 15,000nm of thin and thick films, as well as depths, CDs, and profiles of trenches and contact holes.
Scatterometers/Thin Film Metrology Systems:
1000nm to 15,000nm Wavelength Range The extended wavelength range of the Olympian, from 1000 nm – 15,000 nm, is needed for applications involving:
Thin Film OCD Structures In addition, tools within the Olympian Series are capable of measuring films associated with OCD structures, including hard masks on trenches and contact holes and films present at the bottom or lining of these structures. Trench Array Capability Chart for the Olympian Series Contact Hole Array Capability Chart for the Olympian Series Olympian Series Due to their ability to measure a large range of OCD and thin film structures that cover current and future applications, the tools belonging to the Olympian Series are used extensively for the most challenging applications of today’s semiconductor industry.
Any OCD and Thin Film measurements that are possible with the DUV-Vis-NIR OptiPrime-CD Series can also be achieved with the Olympian-Series (although the reverse is not true).
%N in TiNx, etc.)