Data Storage

DUV-Vis-NIR (Wavelength Range: 190nm – 1000nm) Thin Film Only Metrology System for Magnetic Disks

The n&k 1500-D measures unpolarized reflectance (R) to determine the optical properties (n and k) from 190nm – 1000nm, and thicknesses of thin films, in particular diamond-like carbon (DLC) and magnetic layers, comprising hard disks. This manual load system with automated stage has an extremely low CoO, and is designed to handle all sizes of hard disks. With a 1mm spot size, the raw reflectance data is acquired over a wide wavelength range (190nm – 1000nm) with optimized signal-to-noise ratio. The n&k 1500-D is capable of accurately measuring thickness, as well as Hydrogen and Nitrogen content of increasingly thinner DLC, independent of any variations in the magnetic layers.

Please note that any of the films measured with the 1500 can also be measured by the 2000 Series.

Below are some of the basic measurements for magnetic disks achieved by the 1500-D:

• Thickness and n and k Spectra, from 190nm – 1000nm, of:
  • – Ultra-Thin (20-50Å) Diamond-like Carbon (DLC) Overcoat, Independent of Any Variations of the Mag Layers
  • – Ultra-Thin (5-10Å) Polymer Lubrication Overcoat
  • – Ultra-Thin (~5Å) Chrome Cap Layer
  • – Grain Layer
  • – AlOx/NiFe-Substrate
  • – SiC/ NiFe-Substrate
  • – Resist/BARC/NiFe
• %H and %N in DLC
• Uniformity Maps of the Parameters of Interest

The table below presents disk size and sample handling information for the 1500-D

Model	Disk Size: Inner Diameter	Sample Handling
1500-D	7mm 12mm 20mm 25mm	Manual Load with Automated X- Y Stage Designed to Hold Magnetic Disks