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Diskcon 2008
Date: September 17 - 18, 2008
Location: Hyatt Regency Hotel/Santa Clara Convention Center, Santa Clara, California
Booth: 205
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SPIE Bacus 2008
Date: October 7 - October 8, 2008
Location: Monterey Conference Center, Monterey, California
Booth: 206 |
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SPIE Bacus 2008
Date & Tme: October 9, 2008, 10:20 am
Location: Monterey Conference Center, Monterey, California - Session 25, Ferrante Room
Oral Presentation Title: "Comparative Scatterometric CD and Edge Profile Measurements on a MoSi Mask Using Different Scatterometers"
Authors: Advanced Mask Technology Center (AMTC, Germany)) , Physikalisch-Technische Bundesanstalt (Germany), n&k Technology |
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phone: 408-513-3800
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